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EVS-EN 62047-20:2014

Semiconductor devices - Micro-electromechanical devices - Part 20: Gyroscopes

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Kehtiv alates 07.11.2014
Alusdokumendid
EN 62047-20:2014; IEC 62047-20:2014
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Tüüp
Nimetus
07.11.2014
Põhitekst
This part of IEC 62047 specifies terms and definitions, ratings and characteristics, and measuring methods of gyroscopes. Gyroscopes are primarily used for consumer, general industries and aerospace applications. MEMS and semiconductor lasers are widely used for device technology of gyroscopes. Hereafter, gyroscope is referred to as gyro.

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EVS-EN 62047-11:2013

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EVS-EN 62047-18:2013

Semiconductor devices - Micro-electromechanical devices -- Part 18: Bend testing methods of thin film materials
Uusim versioon Kehtiv alates 14.11.2013