Skip to main content
Back

IEC 62047-21:2014

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials

General information

Valid from 19.06.2014
Directives or regulations
None

Standard history

Status
Date
Type
Name
19.06.2014
Main
IEC 62047-21:2014 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 µm.

Required fields are indicated with *

*
*
*
PDF
104.90 € incl tax
Paper
104.90 € incl tax
Standard monitoring