Skip to main content
Back

EVS-EN ISO 14644-9:2012

Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration (ISO 14644-9:2012)

General information

Withdrawn from 01.06.2022
Base Documents
ISO 14644-9:2012; EN ISO 14644-9:2012
Directives or regulations
None

Standard history

Status
Date
Type
Name
01.06.2022
Main
05.09.2012
Main
This part of ISO 14644 establishes the classification of cleanliness levels on solid surfaces by particle concentration in cleanrooms and associated controlled environment applications. Recommendations on testing and measuring methods, as well as information about surface characteristics, are given in Annexes A to D. This part of ISO 14644 applies to all solid surfaces in cleanrooms and associated controlled environments, such as walls, ceilings, floors, working environments, tools, equipment and products. The classification of surface cleanliness by particle concentration (SCP) is limited to particles between 0,05 μm and 500 μm. The following issues are not considered in this part of ISO 14644: - requirements for the cleanliness and suitability of surfaces for specific processes; - procedures for the cleaning of surfaces; - material characteristics; - references to interactive bonding forces or generation processes that are usually time-dependent and process-dependent; - selection and use of statistical methods for classification and testing; - other characteristics of particles, such as electrostatic charge, ionic charges, microbiological state, etc.

Required fields are indicated with *

*
*
*
PDF
24.40 € incl tax
Paper
24.40 € incl tax
Browse standard from 2.44 € incl tax
Standard monitoring

Customers who bought this item also bought

Main

EVS-EN ISO 14644-14:2016

Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2016)
Newest version Valid from 01.11.2016
Main

EVS-EN ISO 14644-10:2013

Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013)
Withdrawn from 01.06.2022
Main

EVS-EN ISO 14644-8:2013

Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ISO 14644-8:2013)
Withdrawn from 15.07.2022
Main

EVS-EN ISO 14644-7:2004

Cleanrooms and associated controlled environments - Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
Newest version Valid from 05.01.2005