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EVS-EN 60204-33:2011

Safety of machinery - Electrical equipment of machines -- Part 33: Requirements for semiconductor fabrication equipment

General information

Valid from 05.04.2011
Base Documents
IEC 60204-33:2009; EN 60204-33:2011
ICS Groups
13.110 Safety of machinery 25.040.30 Industrial robots. Manipulators 29.020 Electrical engineering in general
Directives or regulations
2006/42/EC Machinery (MD)

Standard history

Status
Date
Type
Name
05.04.2011
Main
EVS-EN 60204-33:2011
This part of IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.

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Standard monitoring
English (PDF 1 MB)

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Standards designation

EVS Estonian standard
EN European standard (published by an CEN or CENELEC)
EN ISO International standard adopted as an European standard
ISO International Organization for Standardization’s standard
IEC International Electrotechnical Commission’s standard
HD CENELEC’s harmonisation document
   
EVS-EN European standard implemented in Estonia
EVS-EN ISO International standard adopted in Europe and implemented in Estonia
EVS-EN ISO/IEC International standard/International electrotechnical standard adopted in Europe and implemented in Estonia
EVS-IEC International electrotechnical standard implemented in Estonia
EVS-ISO International standard implemented in Estonia
   
A, AMD amedment
+A a full standard plus the amendment
/A only amendment
COR, AC corrigendum
+COR a full standard plus the corrigendum
NA national annex
+NA a full standard plus the national annex
/NA only national annex
TS technical specification
TR technical report
CWA agreement, developed by a CEN or CENELEC
prEVS-EN (etc) draft standard
   
et the standard is in Estonian only
en the standard is in English only
et-en the standard is in Parallel text Estonian-English