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EVS-EN ISO 25178-603:2013

Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments (ISO 25178-603:2013)

General information

Valid from 14.11.2013
Base Documents
ISO 25178-603:2013; EN ISO 25178-603:2013
ICS Groups
17.040.20 Properties of surfaces
Directives or regulations
None

Standard history

Status
Date
Type
Name
Main
prEN ISO 25178-603
14.11.2013
Main
EVS-EN ISO 25178-603:2013
This part of ISO 25178 describes the metrological characteristics of phase shifting interferometric (PSI) profile and areal surface texture measuring microscopes.

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Standard monitoring
English (PDF 320 KB)

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Standards designation

EVS Estonian standard
EN European standard (published by an CEN or CENELEC)
EN ISO International standard adopted as an European standard
ISO International Organization for Standardization’s standard
IEC International Electrotechnical Commission’s standard
HD CENELEC’s harmonisation document
   
EVS-EN European standard implemented in Estonia
EVS-EN ISO International standard adopted in Europe and implemented in Estonia
EVS-EN ISO/IEC International standard/International electrotechnical standard adopted in Europe and implemented in Estonia
EVS-IEC International electrotechnical standard implemented in Estonia
EVS-ISO International standard implemented in Estonia
   
A, AMD amedment
+A a full standard plus the amendment
/A only amendment
COR, AC corrigendum
+COR a full standard plus the corrigendum
NA national annex
+NA a full standard plus the national annex
/NA only national annex
TS technical specification
TR technical report
CWA agreement, developed by a CEN or CENELEC
prEVS-EN (etc) draft standard
   
et the standard is in Estonian only
en the standard is in English only
et-en the standard is in Parallel text Estonian-English